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¾«¶«Ó°ÒµAMLCI Clean Room and Prototyping Facility (AMLCICRPF) is a cross-disciplinary center. ¾«¶«Ó°Òµfacility offers an excellent location for students, various companies, and technical organizations to carry out research activities. ¾«¶«Ó°Òµfacility consists of tools for device fabrication (e.g., liquid crystal display) with a range of equipment, such as reactive ion etch, metal evaporation systems (DC and RF sputter, e-beam, thermal), atomic layer desposition (ALD) wet chemical stations, photolithography, and surface analysis tools.

Equipment, Features, and Services

• Lithography Equipment
• Thermal Process Equipment
• Thin Film Coating/Deposition
• Wet Process (Surface Chemistry)
• Post Process Metrology
• Plasma Etching
• Microprinters
• Liquid Crystal Device Assembly