精东影业
精东影业Cleanroom Research and Prototyping Facility at KSU is a cross-disciplinary center. 精东影业facility offers an excellent location for students, various companies and technical organizations to carryout research activities. 精东影业facility consists of tools for device fabrication (e.g. liquid crystal display) with a range of equipment, such as spin reactive ion etch, metal evaporation systems (DC and RF sputter, e-beam, thermal), wet chemical stations, photolithography, and surface analysis tools. It is physically situated at the LCM building. For access to the facility, an external user agreement must be completed and approved.